These feedthroughs are designed for the use with fiber-optics in vacuumchambers, such as for plasma and coating deposition monitoring. They can be used in chambers with wallthicknesses of 5-40 mm and vacuumlevels up to 10-7 millibar.

The feedthrough assembly consists of an M12 housing with Viton® O-ring and two SMA fiber-optic interconnects to allow easy coupling to fiber-optic cables and probes. In order to connect these assemblies to fiber-optic cables inside/outside the chamber, two extra SMA fiber interconnects (ME-FI-SM-MM) should be ordered separately.

The vacuum feedthrough can be delivered for all fiber diameters, from 50 μm up to 1000 μm for UV/VIS/NIR. A high temperature version of the vacuum feedthrough(-HT) is also available enabling the device to withstand temperatures up to 200°C.

Vacuum Feedthroughs Figure 1

Product Information

Specify xx = UV for UV/VIS fiber cables, IR for VIS/NIR